离子束溅射法制备非晶态和晶态Ti-Nj贮氢薄膜合金  

The Film Preparation of Amorphous and Crystalline Ti-Ni Hydrogen Storage Alloys by Ion Beam Sputtering

作　　者：胡伟康[1] 申泮文[1] 张允什[2] 

机构地区：[1]南开大学化学系,天津300071 [2]南开大学新能源材料化学研究所

出　　处：《高等学校化学学报》1993年第2期263-264,共2页Chemical Journal of Chinese Universities

基　　金：国家863计划资助课题

摘　　要：粉末贮氢合金作为一种功能材料在许多领域已有广泛应用。而薄膜贮氢合金是80年代国外新开发的功能材料。目前国外制备薄膜贮氢合金的方法主要有热蒸发法(包括闪蒸)和磁控溅射法。最近我们采用一种新颖的制备方法——离子束溅射法研制非晶态、晶态Ti-Ni薄膜合金。Amorphous Ti0.88Ni1.00 and Ti0.69Ni1.00 alloy films were prepared by means of ion beam sputtering using a TiNi and a Ti2Ni alloy taigets. Crystalline films were obtained on annealing the amorphous at about 660 K and the pressure of 9×10-4 Pa. The film structure and transformation of amorphous were characterised by X-ray diffraction and electron diffraction respectively.

关 键 词：晶态薄膜 贮氢薄膜 离子束溅射法 钛镍贮氢合金 制备 

分 类 号：TG139.7[一般工业技术—材料科学与工程] TB43[金属学及工艺—合金]