低能量PLD方法沉积的a-C薄膜结构及光学性能研究  

Study on the Optical Properties of Amorphous Carbon Films Deposited by Low-energy Pulsed Laser

作　　者：杨益民[1] 郭建[1] 王金斌[1] 杨国伟[1] 

机构地区：[1]湘潭大学物理系,湖南湘潭411105

出　　处：《湘潭大学自然科学学报》2001年第2期42-46,共5页Natural Science Journal of Xiangtan University

基　　金：湖南省教委基金!资助项目 (98B0 0 4)

摘　　要：用低能量脉冲激光沉积 (PLD)方法在单晶硅片、石英玻璃片、载玻片等基底材料上分别沉积了一层碳膜 .X射线衍射谱证明碳膜为非晶态 ,喇曼散射实验表明膜无明显类金刚石特征 ,紫外 -可见分光光度计测试结果表明 :膜在紫外、可见光区折射率低于石英、玻璃等材料 ,红外透过率谱显示膜在红外区有宽范围、显著增透作用 .Carbon films were deposited by low-energy pulsed laser on single cystal silicon chips with sur-face vertical to a-axis, quartz chip and glass respectively. The films were amorphous and no diamond-like character was observed, as confirmed by X-ray diffraction and Raman spectroscopy respectively. Spectrophotometry proved that the films had lower refractive indices than that of quartz or glass for UV-visible light. The spectra of infrared transmittance showed that the films had widely and strongly transmittance-increasing function.

关 键 词：脉冲激光沉积 a-C薄膜 PLD方法 DLC膜 类金刚石碳膜 薄膜结构 光学性能 

分 类 号：O484.1[理学—固体物理] O484.41[理学—物理]