锆、钒离子注入铝形成金属间化合物  

Formation of Intermetallic Compounds by Zr and V Ion Implantation into Aluminum

作　　者：苗伟[1] 陶琨[1] 李彬[1] 柳百新[1] 

机构地区：[1]清华大学材料科学与工程系,北京100084

出　　处：《真空科学与技术》2001年第4期269-272,280,共5页Vacuum Science and Technology

摘　　要：利用金属蒸气真空弧离子源 ,将大束流Zr和V离子注入到Al中 ,在离子注入过程中直接形成了金属间化合物Al3Zr,Al1 0 V和Al3V。当Zr离子束流密度为 6 4μA cm2 ,剂量为 5× 10 1 7ions cm2 时 ,在Al表面形成了稳定相DO2 3 Al3Zr和亚稳相L12 Al3Zr。当V离子束流密度为 5 1μA cm2 ,剂量为 3× 10 1 7ions cm2 时 ,在Al表面形成了Al1 0 V和Al3V。The intermetallic compounds of Al3Zr, Al10V and Al3V were directly prepared by ion implantation. The stable DO23-Al3Zr and metastable Ll2-Al3Zr phases were formed by implanting Zr ions into Al films with a current density of 64 μA/cm2, and a dose of 5×1017 ions/cm2. The Al10V and Al3V phases were grown by implanting V ions into Al films with a current density of 51 μA/cm2 and a dose of 3×1017 ions/cm2. The elastic modulus and hardness of the Al surface significantly increased after the Zr and V ion implantation.

关 键 词：金属间化合物 离子注入 力学性能 铝 表面改性 锆离子 钒离子 

分 类 号：TG174.444[金属学及工艺—金属表面处理] TG146.21[金属学及工艺—金属学]