非晶含氢碳薄膜摩擦与抗擦伤性能的实验研究  

Experimental Study of Tribological and Scratch Properties of a-C∶H Films

作　　者：黄立业[1] 徐可为[1] 吕坚[2] 陈华[1] 杨生荣[3] 刘维民[3] 

机构地区：[1]西安交通大学材料研究中心金属材料强度国家重点实验室,陕西西安710049 [2]特鲁瓦技术大学机械系统并行工程实验室 [3]中国科学院兰州化学物理研究所固体润滑国家重点实验室,甘肃兰州730000

出　　处：《摩擦学学报》2001年第4期241-245,共5页Tribology

基　　金：国家自然科学基金重点项目资助 ( 5 99310 10 ) ;中法先进研究计划项目资助 ( PRA MX99-0 6 ) ;中国科学院兰州化学物理研究所固体润滑国家重点实验室资助 ( 2 0 0 0 )

摘　　要：用射频等离子体增强化学气相沉积法在钛合金表面制备了非晶含氢碳 (a- C∶ H)薄膜 ,利用原子力显微镜、纳米力学探针、划痕仪以及滑动摩擦和微动摩擦试验仪器等研究了其表面形貌、粗糙度、硬度和摩擦性能 ,分析了薄膜的表面粗糙度、硬度及载荷对摩擦系数的影响 .结果表明 :随着薄膜厚度的增加 ,硬度略有提高 ,划痕临界载荷明显提高 ,而表面粗糙度先增加后降低 ,最后趋于稳定 ;室温空气中的滑动摩擦系数随硬度的增大以及表面粗糙度和载荷的减小而降低 ;在微动摩擦试验中 ,随相对湿度增加 ,摩擦系数降低 ,这有利于其在体液环境中的应用 ;薄膜具有良好的耐磨性能 ,经 5 0 0Diamond like carbon coatings (DLC or a C∶H films) were prepared on Ti alloy substrate by rf plasma enhanced chemical vapor deposition (rf PECVD). The surface morphology, surface roughness, hardness, critical load and frictional properties of the films were analyzed and evaluated by means of atomic force microscopy (AFM), nano indentation, scratch test, friction test and fretting wear test. It was found that with the increasing of the film thickness, the surface roughness sharply increases and then significantly decreases, it finally comes to a constant at the end of the test. The hardness and critical load value of the films determined by scratching test increase with thickness; the friction coefficient decreases with decreasing of surface roughness and increasing of hardness at ambient environment in air. After sliding for 5000 cycles, no evident wear traces were found on the film surface and the friction coefficient of DLC coatings against corundum determined with fretting wear test decreases with the increase of relative humidity. It comes to below 0.1 in an aqueous condition. Thus the DLC coatings can be promising candidates as biomedical elements and parts in body fluids.

关 键 词：非晶含氢碳膜 摩擦磨损性能 抗擦伤性能 

分 类 号：O484.5[理学—固体物理] TH117[理学—物理]