电容式测压微传感器的特性分析  

Characteristic Analysis of Capacitive Pressure Microsensor

作　　者：许金海[1] 冯勇建[1] 邓俊泳[1] 

机构地区：[1]厦门大学机电工程系,厦门361005

出　　处：《仪器仪表学报》2001年第4期434-436,440,共4页Chinese Journal of Scientific Instrument

摘　　要：本文主要对电容式测压微传感器的力学特性和电学特性进行分析。文中通过对测量电路工作过程和特性的深入探讨、仿真和验证 ,证明这种传感器的测量电路具有良好的线性度和稳定性。通过对传感器的敏感元件硅膜片的力学分析 ,建立了传感器的力学模型。分析的结果表明The mechanics and electrics characteristics of a type of capacitive microsensors are introduced here.It has been proved that the measurement circuit has excellent linearity and stability through the deep discussion, simulation and experimentof the characteristic and the operation procedure of the circuit.Through the mechanics analysis of the sensitive component—— silicon membrane,its mechanics model has been established.the analysis has proved that the physical characteristics of the sensitive component and the capacitance are the main factors that influence linearity of the output response of the sensor.

关 键 词：微传感器 电容式 特性分析 硅膜片 测量电路 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]