有机薄膜电致发光器件工艺检测的一种简便方法——覆膜加热观测法  

A Simple Method for Evaluating Organic Light-emitting Diodes During Fabrication Process——Observation of Covered and Heated Films

作　　者：周美娟[1] 何钧[1] 廖良生[1] 侯晓远[1] 

机构地区：[1]复旦大学物理系

出　　处：《发光学报》2001年第2期125-130,共6页Chinese Journal of Luminescence

基　　金：国家自然科学基金资助项目 ( 697760 3 4 )

摘　　要：提出了一种简便易行、并与有机薄膜电致发光器件制备工艺完全兼容的工艺检测方法———覆膜加热观测法。这种方法是在器件的制备工艺过程中 ,同时在铟锡氧化物 (ITO)电极和各层有机薄膜上覆盖一层不透气的薄膜 (如金属Al膜等 ) ,接着进行快速加热 ,最后对器件表面进行形貌观测。采用这种方法 ,观察了器件表面气泡的形成过程 ,观察了加热温度、ITO表面处理以及有机物纯度对气泡形成的影响。实验表明 ,覆膜加热观测法能有效地对工艺进行对比检测 ,从而达到改进工艺、提高器件质量的目的。Organic light emitting diodes(OLED) have been investigated for over 10 years and have been in a stage ready for commercialized applications.However,the stability or the lifetime of OLED is still a major issue to be further investigated.As is known,the stability of OLED is closely related to processing techniques,and the quality of each processing steps could be evaluated by some test methods.Here,we proposed a simple method for the fabrication test of OLED—“Observation of covered and heated films”,which is completely compatible with the technique of OLED fabrication. In this method,a hole transport layer (such as N,N' diphenyl N,N' bis ｛3 methylphenyl｝ ｛1,1' biphenyl｝ 4'4 diamine(TPD)) is firstly deposited on a half of indium tin oxide(ITO) surface,and then the mask used for patterning was turned into 90° to let the following deposited electron transport layer (such as tris (8 hydroxyquinoline) aluminum(Alq)) be perpendicular to TPD layer.After the deposition of organic films,a layer of low air permeable film(such as Al film) was deposited on the substrate as a covering film.Therefore,four different areas were formed on the same ITO substrate with the layer structurs of Al/Alq/TPD/ITO,Al/TPD/ITO,Al/Alq/ITO,and Al/ITO,respectively.The as prepared sample was then treated by rapid heating.Lastly,the thermal treated sample was used for microscopic observation. By using this method,gas bubble formation and organic crystallization on the sample surface were observed .The effect of annealing temperature,ITO surface treatment,and purification of organic sources on the bubble formation were also observed.As increasing the annealing temperature,the induced bubbles from organic layers were getting bigger in size(larger than 50μm) and more in numbers,while the bubbles induced from ITO surface were limited in a size less than about 10μm.No bubbles can be observed if ITO surface was thermally treated before any deposition of organic films.And bubbles can be reduced if organic sou

关 键 词：有机薄膜 热处理 表面形貌 工艺检测 电致发光器件 覆膜加热观测法 

分 类 号：TN873.3[电子电信—信息与通信工程]