SO_2薄膜气敏传感器光学特性的分析  

Optical Characteristics Analyses of Thin Film SO_2 Gas Sensor

作　　者：汤兆胜[1] 赵强[1] 范正修[1] 邵建达[1] 

机构地区：[1]中国科学院上海光学精密机械研究所,上海201800

出　　处：《光学学报》2001年第8期957-960,共4页Acta Optica Sinica

摘　　要：采用光度法以及椭圆偏振法测量技术对掺有贵金属或过渡金属元素的SnO2 薄膜以及在不同PO2 PAr比条件下制备的VOx 系列的薄膜进行了系统的光学气敏特性测试。比较了各种薄膜对SO2 气体的光学气敏特性 ,发现在一定条件下制备的SnO2 Pd、VOx 薄膜对SO2 气体在可见光区有很好的灵敏性 ,SnO2 Zr薄膜对SO2 气体在近红外区有很好的灵敏性。The optical sensitive characteristic of SnO2 and VOx thin films to the gas SO2 is investigated with photometric and ellipsometric methods. It is found that the thin films of the Pd-doped SnO2 and no-dapant-VOx have good optical sensitive characteristics to the gas SnO2 in the visible range, and the Zr-doped SO2 film in the near-infrared area. The results show that the change of the optical characteristic is directly related to the variation of optical gap and the concentration of free carrier in the thin films.

关 键 词：气敏传感器 薄膜 二氧化硫 光学特性 

分 类 号：O484.41[理学—固体物理] TP212[理学—物理]