激光干涉仪应用于无导轨测距的研究  

LASER INTERFEROMETER APPLIED TO MEASURING ABSOLUTE DISTANCE

作　　者：邱宗明[1] 郭彦珍[1] 李信[1] 

机构地区：[1]西安理工大学,西安710048

出　　处：《光子学报》2001年第7期882-884,共3页Acta Photonica Sinica

摘　　要：本文提出了一种使用外差激光干涉仪实现无导轨测距的方法 .该方法动态跟踪测量反射镜 ,使测量信号不中断 ,实现反射镜在一定范围内的非直线运动 .这样 ,拥有双频激光干涉仪的用户 ,再添置一台比较简单的跟踪装置 ,即可用于无导轨测距 ,测量精度可远高于通用测距仪 ,为大型设备现场组装和安装提供了新方法 .A dynamic servo-tracking system, which tracks measurement reflector of double frequency laser interferometer is presented by this paper. In this system the measurement reflector can be moved nonlinearly at same range and light signal is continual. Thus measuring absolute distance without linear orbit is realized. The measurement accuracy of this system is higher than that of general ranger. The method provides a practical method for assembling and mounting large equipment outside factory.

关 键 词：激光干涉仪 跟踪测量 无导轨测距 机械测量仪器 

分 类 号：TH744.3[机械工程—光学工程]