数字伺服聚焦式位移传感器的研制  

Study on Digital Servo Focus Displacement Sensor

作　　者：杨练根[1] 郭军[1] 谢铁邦[1] 谢峰[1] 

机构地区：[1]华中科技大学机械科学与工程学院

出　　处：《华中科技大学学报（自然科学版）》2001年第7期44-46,共3页Journal of Huazhong University of Science and Technology(Natural Science Edition)

基　　金：国家"九五"重点科技攻关项目 (96 91 9 0 1 0 2 0 1 )

摘　　要：提出了一种基于改进的傅科刀口法的数字伺服聚焦式位移传感器 ,分析了其基本原理、结构与数字伺服控制系统的主要构成 .传感器采用基于离散参数自学习的增量型自整定PID控制算法 ,测量中通过能量信号来判断光点位置 ,且通过推理算法结合应用准则从知识库中重新确定PID系数 .对标准粗糙度样板的检测证明该传感器具有较高的精度 .Based on the improved Foucault knife method, a digital servo focus displacement sensor is proposed. The basic principle, structure and digital servo control system of the sensor are discussed. A incremental and self determined PID algorithm based on dispersed parameter self study is applied to this sensor. In the measuring process, position of optical point is judged through energy signal, then the PID coefficients can be determined from knowledge library by using reasoning algorithm and applied principles. It has been proven that the sensor is with precision according to the measured results of surface roughness specimen.

关 键 词：位移传感器 数字伺服控制 傅科刀口法 表面形貌 自整定PID控制 形貌测量 

分 类 号：TP212.12[自动化与计算机技术—检测技术与自动化装置] TG84[自动化与计算机技术—控制科学与工程]