用于均匀照明的纯位相元件多元化分析  

Analysis of Pure Phase Elements Used for Uniform Illumination from Different Views

作　　者：徐俊中[1] 赵逸琼[1] 王炜[1] 李永平[1] 

机构地区：[1]中国科学技术大学物理系,安徽合肥230026

出　　处：《中国科学技术大学学报》2001年第5期512-517,534,共7页JUSTC

基　　金：国家 8 6 3 416 2 3.7课题资助项目

摘　　要：论文通过理论分析探讨了用于均匀照明问题的纯位相元件的通用性问题 ,揭示了纯位相元件的设计与实际应用系统各类参数指标的依赖关系 .并且还研究了刻蚀工艺中的正负片问题 。This paper presents an analysis of PPE (Pure Phase Elements) used for uniform illumination from different points of view. The versatility problem of PPE is studied in the first part, which shows the relationship between the design of PPE and the specific parameters of the real application system. The positive and negative plates is introduced in the second part, which is particularly important for the fabrication of PPE.

关 键 词：纯位相元件 通用性 正负片 均匀照明 多元化分析 刻蚀工艺 衍射光学 惯性约束核聚变系统 

分 类 号：O436.1[机械工程—光学工程]