磁控溅射制备YBCO超导薄膜的AFM研究  

AFM Study on YBCO Superconducting Film Fabricated by Magnetron Sputtering

作　　者：王小平[1] 刘援[1] 王霈文[1] 冯稷[2] 李季[1] 林晨光[1] 华志强[1] 吴柏枚[3] 

机构地区：[1]北京有色金属研究总院,北京100088 [2]中国科学院物理研究所,北京100080 [3]中国科技大学二系,合肥230026

出　　处：《稀有金属》2001年第6期416-418,共3页Chinese Journal of Rare Metals

基　　金：国家超导中心资助项目863 CD0 70 10 4)

摘　　要：采用中空柱阴极直流磁控溅射装置制备YBCO超导薄膜。应用原子力显微镜 (AFM)研究了在最佳工艺条件下沉积在LaAlO3 和Zr(Y)O2 上的具有c轴取向的YBCO超导薄膜及其相应衬底的表面形貌。生长的YBCO膜都具有较好的表面结构。在LaAlO3 单晶衬底上的YBCO膜形成大颗粒岛状结构 ,颗粒生长整齐 ,尺寸大小均匀 ;生长在单晶Zr(Y)O2 上的YBCO膜则形成起伏较大的层状与岛状生长的混合结构 ,这些差别的产生与衬底的初始状况及制备过程中膜与衬底的界面作用有关。分析了形成超导薄膜不同表面形貌的原因 ,从生长机理角度讨论了表面形貌与缺陷和位错的形成机制。A dc magnetron sputtering eguipment with hollow cy lindr ical cathode was used to fabricate the YBCO superconducting films on LaAlO_3 an d Zr(Y)O_2 substates. The surface morphology of films with highly-quality c -orientation prepared in the optimized procedure and the corresponding sub strate was measured by atomic force microscopy(AFM). The results indicate that a ll the grown films possess relatively perfect structure. The surface of the film s on LaAlO_3 substrates presents an island-structure with large, u niform and regular grains, while the films grown on Zr(Y)O_2 substrates show a mixture structure of the layered and islanded structure. The difference can be i nduced by the condition of the substrate or the interface between films and subs trates during depositions.

关 键 词：磁控溅射 YBCO薄膜 表面形貌 AFM 超导薄膜 制备 

分 类 号：TM26[一般工业技术—材料科学与工程]