Fe-Zr-B非晶薄膜制备与性能研究  

Preparing and Properties Investigating of the Amorphous Fe-Zr-B Fihns

作　　者：程新利[1] 许裕生[1] 徐炜新 金惠娟 章靖国 

机构地区：[1]苏州大学理学院物理系

出　　处：《上海钢研》2001年第2期13-17,共5页Journal of Shanghai Iron and Steel Research

摘　　要：本文研究了采用直流磁控溅射法制备的Fe-Zr-B非晶薄膜,用X-射线衍射,透射电子显微镜(TEM)和X射线光电子能谱(XPS)研究了薄膜的结构。X射线光电子能谱(XPS)结果表明样品表面氧化较明显,深层部分Fe,zr,B结合占主导地位。用振动样品磁场计测量了薄膜的磁性能,并与用化学还原法制备的非晶Fe-Zr-B超细粉做了比较。The amorphous Fe-Zr-B films prepared by DC Magnetron sputtering has been investigated using X-ray diffraction, TEM and XPS. The result shows that the amorphous Fe-Zr-B film may consist of two amorphous microstructure. XPS shows that surface of the film has been oxygenized partly. The magnetic properties of Fe-Zr-B film has been measured by using VSM and compared with the amorphous superfine powder of Fe-Zr-B prepared by chemical reduction.

关 键 词：Fe-Zr-B合金 非晶薄膜 直流磁控溅射 制备 性能 软磁材料 

分 类 号：TM271.2[一般工业技术—材料科学与工程] TG139.8[电气工程—电工理论与新技术]