离子束刻蚀菲涅耳金环研究  

Ion beam etching for making Fresnel Au-zone plates

作　　者：傅新定[1] 方红丽[1] 

机构地区：[1]中国科学院上海冶金研究所

出　　处：《核技术》1989年第5期292-295,共4页Nuclear Techniques

摘　　要：应用离子束刻蚀技术,首先确定金膜的刻蚀速率并研究台阶倾角与刻蚀参数之间的关系。最终微细加工出菲涅耳金环和多针孔金箔,分别成功地用于激光等离子体空间分布测量和激光核聚变诊断。结果表明,离子束刻蚀菲涅耳环带板是提高编码相机分辨率的关键,从而提高了测量等离子体空间分布的分辨率。The Fresnel Au-zone plates and the multiple-pin-hole Au-foils are microfabricated using ion beam etching technique. The key points how to determine the etching rate and the relation between terrace sloping angle and etching parameters are indicated. The plates and foils so obtained have greatly improved the resolving power of the coded imaging camera and have been successfully used to measure the spacial distribution of laser plasma and to diagnose of nuclear fusion.

关 键 词：离子速刻蚀 射角 菲湿耳金环 

分 类 号：O56[理学—原子与分子物理]