基体预处理方式对合成类金刚石薄膜的影响  

Effects on the Synthesis of Diamondlike Carbon Films by Various Matrix Treatment

作　　者：李培勋[1] 王天民[1] 钟玉荣[1] 卫秀成[1] 达国祖[1] 

机构地区：[1]兰州大学物理科学与技术学院

出　　处：《兰州大学学报（自然科学版）》2001年第4期46-50,共5页Journal of Lanzhou University(Natural Sciences)

基　　金：航空科学基础基金 (98G5 112 4 )资助项目

摘　　要：研究了不同的钛基体预处理方式对先驱聚合物合成类金刚石薄膜的影响 ,结果表明 8字形研磨和平行研磨方式处理的基体上都长出了类金刚石薄膜 ,但是其表面形貌有很大的差别 ,平行研磨方式处理基体表面所引入的缺陷有利于金刚石相形成 :引入中间过渡层镍 Ni,可以增强薄膜与不锈钢基体的结合力 ,有利于金刚石的生成 ,XRD谱中可以看到弱的金刚石衍射峰 ;讨论了类金刚石薄膜中金刚石晶体生长的机制 .Using precursor polymer pyrolysis, effects on the synthesis of diamondlike carbon films by various matrix treatment was studied. The results shows that the morphology and structure of DLC films synthesized by 8 shaping and parallel grind matrix treatments are different. The defects induced by parallel grind is favorable for diamond phase growth. Nickel interlayer between stainless matrix and diamond film can improve cohesion and enhance nucleation. The mechanism of nucleation are also discussed.

关 键 词：类金刚石薄膜 基体预处理 中间过渡层 晶体生长 表面形貌 8字形研磨 平行研磨 

分 类 号：O484.1[理学—固体物理]