微机电系统的微观摩擦学研究进展  

Progress of Micro-tribology on Micro-electro-mechanical Systems

作　　者：邓昭[1] 饶文琦[1] 任天辉[1] 余来贵[2] 刘维民[2] 余新良 

机构地区：[1]上海交通大学化学化工学院,上海200240 [2]中国科学院兰州化学物理研究所固体润滑国家重点实验室,甘肃兰州730000 [3]浙江家园药业有限公司,浙江东阳322118

出　　处：《摩擦学学报》2001年第6期494-498,共5页Tribology

基　　金：中科院兰州化学物理研究所固体润滑国家重点实验室基金资助 ( 2 0 0 0 )

摘　　要：对微机电系统的微观摩擦学研究现状进行了综述 ,介绍了在微机电系统中摩擦学呈现的各种新特征 ,以及材料、环境和不同工况条件对微机电系统运行稳定性的影响 .从微观摩擦学角度探讨了微机电系统的润滑问题 ,介绍了表面改性和薄膜润滑等在解决微机电系统润滑问题方面的研究现状 。The current state and progress of the micro-tribological studies on micro-electro-mechanical systems (MEMS) are summarized. Various new features of the friction and wear behavior of the MEMS are introduced. And the effects of the material properties, environments and working conditions on the operation of MEMS are briefed. The lubrication of MEMS is elucidated from the viewpoint of nano-tribology, while the application of surface modification and ultra-thin film lubrication for MEMS is discussed. Moreover, a prospect concerning the further research work on the micro-and nano-tribology of MEMS is also provided.

关 键 词：微机电系统 微观摩擦学 表面改性 薄膜 超润滑 

分 类 号：TH117.1[机械工程—机械设计及理论] TH－39