微电子工业生产废水处理及回收利用  

Treatment and reclamation utilization of the wastewater in microelectronic industry

作　　者：胡伟林[1] 

机构地区：[1]华越微电子有限公司,浙江绍兴312016

出　　处：《工业水处理》2001年第12期40-41,共2页Industrial Water Treatment

摘　　要：阐述了微电子工业芯片制造而产生的含氟废水、硅片研磨废水以及纯水处理混床再生所产生的高浓度酸碱废水的处理方法 ,特别对含氟废水的处理进行了大胆的尝试 ,取得了明显的成效。对处理后的合格废水回收用作工艺设备及动力设备的冷却水 。The treatment process of the wastewater that is produced in the microeletronic industry chip manufacture field is expounded,including fluoride wastewater and silica grind wastewater and the high acid and caustic concentration wastewater coming from the mixed bed regeneration in the D.I system,and specially do the brave experiment to the wastewater containing F -. An obvious effect has been achieved. The treated wastewater has been used as cooling water of the process equipment and power equipment,and it obviously benefits the economy and society.

关 键 词：含氟废水 研磨废水 酸碱废水 回收利用 微电子工业 废水处理 

分 类 号：X76[环境科学与工程—环境工程]