溶胶-凝胶法制备的Y_2O_3薄膜的光波导性质研究  

Elaboration and Characterization of Y_2O_3 Waveguide Thin Films Prepared by Sol-Gel Process

作　　者：郭海[1] 张慰萍[1] 楼立人[2] 余申伟[2] 董宁[2] MugnierJ 

机构地区：[1]中国科学院结构分析开放研究实验室,安徽合肥230026 [2]中国科技大学物理系,安徽合肥230026 [3]LaboratoiredesPhysicoChimiedesMateriauxLuminescents CNRSUMR5620,UniversiteClaudeBernardLyonI

出　　处：《中国稀土学报》2001年第6期511-514,共4页Journal of the Chinese Society of Rare Earths

基　　金：安徽省自然科学基金 (0 0 0 4610 6) ;中法先进研究合作计划 (PRAMX99-0 5 )资助项目

摘　　要：用醋酸钇溶解于甲氧基乙醇的溶胶 凝胶法制备了Y2 O3光波导薄膜。通过二乙烯三胺的络合作用 ,获得了均匀和稳定的前驱液 ,并用浸渍提拉法得到了薄膜。差热分析、红外吸收光谱被用来表征Y2 O3凝胶和粉末。用XRD、扫描电子显微镜、m线法和波导荧光光谱法研究了Y2 O3光波导薄膜的结构和光波导性质。结果表明 ,Y2 O3薄膜对于光活性掺杂是一种很好的基质材料 ,预示Y2 O3薄膜在光电子方面具有巨大的应用前景。Waveguide thin films of yttrium oxide (Y 2O 3) were prepared by sol gel process.The films were successfully synthesized using yttrium acetate in methoxyethanol. A homogeneous and stable solution was obtatined by the reaction with diethylenertiamine. Precursor films were deposited using a dip coating method. Differential thermal analysis and infrared spectroscopy were used to characterize the Y 2O 3 egl and powder. XRD, scan electron microscopy, m line spectroscopy and waveguide fluorescence spectroscopy were used to characterize the films. The preliminary results show that this thin film is a good host material for active dopants and of great potential for future application in optoelectronics.

关 键 词：稀土 溶胶-凝胶法 Y2O3 光波导薄膜 氧化钇 制备 光波导性质 掺杂 

分 类 号：TN252[电子电信—物理电子学] O484.41[理学—固体物理]