复合静电-磁浸没透镜的宽束曲轴聚焦性质及像差理论  

Curvilinear-axis Focusing and Aberration Theory of Wide Electron Beams for Combined Electrostatic-immersion Magnetic Lens Systems

作　　者：程敏[1] 唐天同[1] 姚振华[1] 

机构地区：[1]西安交通大学电子与信息工程学院电子科学与技术系,西安710049

出　　处：《真空科学与技术》2002年第1期5-9,共5页Vacuum Science and Technology

基　　金：国家自然科学基金资助项目 (No .699710 19)

摘　　要：研究了新型的复合静电 磁浸没透镜的曲光轴高斯电子光学性质及像差特性。应用宽束曲轴理论 ,导出了三维局部正交坐标系中的电子运动的中心轨迹方程和曲光轴的近轴轨迹方程 ;利用数学软件Mathematica推导出了复合静电 磁浸没透镜全部曲轴二级像差系数。作为实例 ,文中针对轴上磁场和电场具有某种解析表达式的旋转对称的静电 磁浸没透镜系数 ,计算了它的曲轴高斯聚焦特性和二级像差 。Curvilinear-axis Gaussian electron optical properties and aberration characteristics of the novel electrostatic-immersion magnetic lenses are studied. Based on general wide beam and curvilinear-axis theory, central trajectory equations and paraxial trajectory equations are obtained in local orthogonal coordinates, and all of the second-order aberration coefficients are derived using the software package Mathematica. As an example, the Gaussian focusing properties and the second-order curvilinear-axis aberrations of an electrostatic-immersion magnetic lens, the axial field distributions of which can be analytically expressed, are calculated and the diagrams of second-order aberrations are also given.

关 键 词：静电-磁浸没透镜 曲光轴 像差 轨迹 聚焦性质 微电子技术 带电粒子光学 

分 类 号：O463.1[机械工程—光学工程] TN401[理学—电子物理学]