粗光栅线位移测量系统细分误差补偿前后的精度分析  

Precision Analysis on the Coarse Grating Linear Encoder Before and After Eliminating the Subdivision Error

作　　者：林鹏[1] 陈小强[1] 袁祥辉[1] 廖念钊 

机构地区：[1]重庆大学光电技术及系统开放实验室,重庆400044

出　　处：《计量学报》2002年第1期26-29,共4页Acta Metrologica Sinica

摘　　要：本文针对粗光栅线位移测量系统的误差来源 ,在大量实验的基础上 ,经过理论分析 ,得出细分误差与本底噪声的线性关系式 ,找到了系统修正误差时的理论依据。同时对系统在细分误差补偿前后作了精度分析。Having researched the error source of the coarse grating linear encoder, the paper analyzed the experiment data, then draw the linear relation between the subdivision error and background noise, which can be used as theoretical basis when amending noise. Meanwhile the system precision has also been analyzed before and after the subdivision error was compensated.

关 键 词：粗光栅线 细分误差 精度分析 位移测量系统 误差补偿 本底噪声 

分 类 号：TB921[一般工业技术—计量学] TH741.6[机械工程—测试计量技术及仪器]