升温Ta+N双注入对硬质合金性能的影响  

INFLUENCE OF Ta+N ION IMPLANTATION WITH ELEVATED TEMPERATURE ON THE PROPERTY OF HARD METAL

作　　者：赵青[1] 任文静[2] 耿漫[1] 

机构地区：[1]核工业西南物理研究院 [2]成都理工大学,成都610059

出　　处：《核聚变与等离子体物理》2002年第1期61-64,共4页Nuclear Fusion and Plasma Physics

基　　金：国防科技重点实验室基金资助项目 (98JS5 0 3 3HZ5 80 1)

摘　　要：利用升温离子注入技术 ,在PSII装置中实现了N +Ta双注入对硬质合金的有效表面改性 ,注入剂量为8× 10 1 7ions·cm- 2 ,注入表面温度分别为 10 0℃和 40 0℃。用显微硬度计测定硬度 ,表明试样表面显微硬度均有提高 ,其中 40 0℃试样表面显微硬度提高最大 ,高达 2 0 0 %。用俄歇电子能谱分析元素的浓度剖面 ,发现把温度从 10 0℃提高到 40 0℃ ,其注入层深度显著增加。X射线衍射测出了注入层表面形成的WN、TaN析出相。升温双元离子注入取得升温单元离子注入改性同样的效果 。Hard metal has been implanted with nitrogen plus tantalum dual ions at temperature of 100℃ and 400℃ with a dose of 8×10 17ions·cm -2.Microhardness measurements were performed to evaluate the surface property improvements.Auger electron spectroscopy is used to determine the nitrogen and tantalum concentration depth profiles.The thickness of implanted layers increased by about an order of magnitude when the temperature was elevated from 100℃ to 400℃.Higher surface hardness is obtained in the higher temperature implantion,an improvement of 200% for the 400℃ implantation.Scanning electron microscopy image shows distinct microstructure changes,and X-ray diffraction (XRD)showed the presence of nitrides of tantalum,tungsten in the implanted surface.

关 键 词：硬质合金 N+Ta双元注入 温度 升温离子注入 氮 钽 表面改性 

分 类 号：TG135.5[一般工业技术—材料科学与工程] TG174.444[金属学及工艺—合金]