磁控溅射制备PET非织造布基Ag膜的结构及其电磁屏蔽性能  

Structure and Electromagnetic Shielding of Silver Deposited PET Nonwoven by Magnetron Sputtering

作　　者：徐文正[1,2] 魏取福[1] 袁小红[1] 魏安方[2] 凤权[2] XU Wenzheng;WEI Qufu;YUAN Xiaohong;WEI Anfang;FENG Quan(Key Laboratory of Eco-Textiles,Ministry of Education,Jiangnan University,Wuxi 214122,China;Anhui Provincial Key Laboratory of Textile Fabric,Anhui Polytechnic University,Wuhu 241000,China)

机构地区：[1]江南大学生态纺织教育部重点实验室,江苏无锡214122 [2]安徽工程大学纺织面料安徽省高校重点实验室,安徽芜湖241000

出　　处：《材料科学与工程学报》2018年第6期932-935,992,共5页Journal of Materials Science and Engineering

基　　金：安徽高校自然科学研究重点资助项目(KJ2017A109);安徽省高等教育提升计划自然科学研究资助项目(TSKJ2015B28)

摘　　要：采用直流磁控溅射技术在PET非织布表面沉积Ag膜,利用正交试验法分析磁控溅射工艺参数对其电磁屏蔽效能(SE)的影响,结果表明磁控溅射工艺参数对电磁屏蔽效能的影响次序为溅射功率、溅射时间、溅射压强;最佳工艺参数分别为:30W、15min、0.5Pa,在30M～1.5GHz频率范围内,其屏蔽效能均值达到39.37dB。进一步采用多种表征手段分析其物理结构特征及表面状态,结果显示Ag在PET纤维表面成膜致密,分布均匀,结晶性能良好,且以单质银的形态存在。Silver(Ag) films were successfully deposited on polyester(PET) nonwoven by using direct current(DC) magnetron sputtering techniques. Orthogonal analysis was performed to study the influence of magnetron sputtering process parameters on electromagnetic shielding effectiveness(SE). The experimental results show that electromagnetic SE of the Ag film coated PET nonwoven is strongly dependent on sputtering power and time, and is only slightly affected by the working gas pressure. Under the best sputtering condition of 30 W, 15 min and 0.5 Pa, respectively, the average of electromagnetic SE reaches 39.37 dB measured at the frequency ranging from 30 M Hz to 1.5 G Hz. And the structure and surface morphology of Ag covered PET nonwoven were also characterized by several methods including Atomic force microscope(AFM). It can be found that the dense and uniform Ag film with high degree of crystallinity is formed on the surface of PET nonwoven, and exists in a pure elemental state.

关 键 词：磁控溅射 银 PET非织造布 电磁屏蔽 

分 类 号：TB34[一般工业技术—材料科学与工程] TS179[轻工技术与工程—纺织材料与纺织品设计]