缓冲区容量为2的单臂树形多组合设备的建模与调度  

Modeling and scheduling of single-arm tree-like multi-cluster tools with two-space buffering modules

作　　者：黄鹏 白丽平[1] 朱清华[1] HUANG Peng;BAI Liping;ZHU Qinghua(School of Electro-Mechanical Engineering,Guangdong University of Technology,Guangzhou 510006,China)

机构地区：[1]广东工业大学机电工程学院

出　　处：《系统工程理论与实践》2018年第12期3244-3252,共9页Systems Engineering-Theory & Practice

基　　金：国家自然科学基金(61673123,71673060)~~

摘　　要：在半导体制造中,多组合设备被广泛应用于晶圆加工.对于缓冲区容量为2的单臂树形多组合设备,当机械手的移动时间远远小于晶圆加工时间时,它是否存在一个1-晶圆最优周期调度仍是个有待解决的问题.针对此问题,本文首先运用Petri网对系统进行建模,经过对单组合设备调度和相邻设备协调运作的分析,证明系统的1-晶圆周期达到下界值时总是可调度的,并给出相应的调度算法.最后通过实例验证了算法的有效性以及实用性.Multi-cluster tools have been widely adopted in wafer fabrication in semiconductor manufacturing.For single arm tree-like multi-cluster tools with two-space buffering modules,when the moving time of robots is much less than wafer processing time,whether there is one-wafer optimal cyclic scheduling is still a problem remaining to be solved.Aiming at this problem,a Petri net model has been built up to analysis the tool system.Based on the Petri net model,conditions are presented under which a one-wafer cyclic schedule with the lower bound of cycle time can be found and an algorithm is developed to coordi- nate the activities of adjacent arms.Finally,an illustrative example is given to show the effectiveness and application of the algorithm.

关 键 词：晶圆制造 多组合设备 PETRI网 调度 

分 类 号：TP278[自动化与计算机技术—检测技术与自动化装置]