柔性衬底上使用等离子增强原子层沉积制备的氮化镓薄膜物性分析  

Physical Analysis of Polycrystalline GaN Thin Films on Flexible Substrate by Plasma-Enhanced Atomic Layer Deposition

作　　者：李美玲 何荧峰 卫会云 刘三姐 仇鹏 宋祎萌 安运来 彭铭曾 郑新和 LI Meiling;HE Yingfeng;WEI Huiyun;LIU Sanjie;QIU Peng(Dept.of Appl.Phys.,School of Mathematics and Phys.,Beijing University of Science and Technol.,Beijing 100083,CHN)

机构地区：[1]北京科技大学数理学院应用物理系,北京100083

出　　处：《半导体光电》2018年第6期819-823,827,共6页Semiconductor Optoelectronics

基　　金：北京市自然科学基金项目(4173077;2184112)

摘　　要：采用等离子增强原子层沉积技术(PE-ALD)在350℃温度下,在KAPTON柔性衬底上直接生长出多晶GaN薄膜。利用低角度掠入射X射线衍射仪、AFM、SEM、TEM、XPS对薄膜的晶体结构、表面形貌及薄膜成分进行了表征和分析。结果表明,薄膜呈多晶态,且具有良好的均匀性;薄膜中的N元素全部以N-Ga键形式存在;大部分Ga元素以Ga-N键形式构成GaN;少量的Ga元素分别以Ga-Ga键和Ga-O键形式构成金属镓以及Ga2O_3。研究发现,虽然KAPTON具有较好的耐高温性,但GaN会反向扩散进入KAPTON衬底,形成具有一定厚度的GaN扩散层。Polycrystalline GaN thin films were successfully fabricated on KAPTON flexible substrates at 350℃ by plasma-enhanced atomic layer deposition(PE-ALD). The crystal structure, surface morphology and composition of GaN thin films were characterized by grazing incident X-ray diffraction(GIXRD), atomic force microscope(AFM), scanning electron microscope(SEM), transmission electron microscope(TEM)and X-ray photoelectron spectrometer(XPS). The results show that the thin films are polycrystalline and have a good uniformity, and all the N elements of the as-deposited thin films are in the form of N-Ga bond, indicating that all the N elements are formed into GaN thin films. A little amount of Ga elements exist in the form of Ga-O and Ga-Ga bond to form Ga and Ga2O3. It is indicated that, although KAPTON has good resistance of high temperature, GaN will diffuse back into the KAPTON substrate with a certain distance to form a GaN diffusion layer.

关 键 词：氮化镓 柔性衬底 等离子增强原子层沉积 反向扩散 

分 类 号：TN304[电子电信—物理电子学]