多参量微纳集成传感器  

Multi-Parameter Micro/Nano Integrated Sensor

作　　者：宋金龙[1] 何常德[1] 王任鑫[1] 薛晨阳[1] 张文栋[1] Song Jinlong;He Changde;Wang Renxin;Xue Chenyang;Zhang Wendong(Key Laboratory of Instrumentation Science & Dynamic Measurement of the Ministry of Education, North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室

出　　处：《微纳电子技术》2019年第2期119-125,共7页Micronanoelectronic Technology

基　　金：国家高技术研究发展计划(863)资助项目(2015AA042601);国家杰出青年科学基金资助项目(61525107);国家自然科学基金青年科学基金资助项目(61604134);山西省‘1331工程’重点学科建设计划经费资助项目

摘　　要：为了满足采煤机械工作状态在线监测在线分析系统对微纳传感系统小型化和集成化的要求,设计了一种将压阻式振动传感器与铂电阻温度传感器集成的多参量微纳集成传感器。振动传感器由一个惯性质量块、八个梁和边框组成,惯性质量块通过八个梁悬挂在边框上。为了减小集成传感器的面积,铂电阻温度传感器的形状为"蛇"形。对所设计的多参量微纳传感器进行了流片加工和性能测试,铂电阻温度传感器的灵敏度为1.04 mV/℃,量程为-20~80℃,振动传感器的灵敏度为49.89 mV/g,灵敏度幅值线性度为-0.33%,量程为50g。实验结果表明,研制的多参量微纳集成传感器满足对振动和温度信号测量的需求。A multi-parameter micro/nano sensor integrating the piezo-resistive vibration sensor with the platinum resistance temperature sensor was designed to satisfy the demand of the miniaturization and integration of the micro/nano sensor system for the on-line monitoring and analysis system of the working state of the mining machinery.The vibration sensor consists of a proofmass,eight beams and a frame.The proof-mass was suspended on the frame through eight beams.For the sake of reducing the area of the integrated sensor,the shape of the platinum resistance temperature sensor was designed as a "snake".The designed multi-parameter micro/nano sensor was fabricated,and the performances of the sensor were tested.The sensitivity of the platinum resistance temperature sensor is 1.04 mV/℃in the test range of-20-80℃.The sensitivity,sensitivity amplitude linearity and test range of the vibration sensor are 49.89 mV/g,-0.33% and50 g,respectively.The test results show that the developed multi-parameter micro/nano integrated sensor can meet the demand of the vibration and temperature signal test.

关 键 词：多参量微纳集成传感器 在线监测在线分析系统 小型化和集成化 压阻式振动传感器 铂电阻温度传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]