基于多体系统理论的晶圆测试平台误差建模  

Error Modeling of Wafer Test Platform Based on Multi-body System Theory

作　　者：王英剑 苏中[1] 刘洪[1] WANG Ying-jian;SU Zhong;LIU Hong(Beijing Key Laboratory of High Dynamic Navigation Technology,University of Beijing Information Science & Technology,Beijing 100101,China)

机构地区：[1]北京信息科技大学高动态导航技术北京市重点实验室,北京100101

出　　处：《计算机仿真》2019年第1期279-283,共5页Computer Simulation

基　　金：国家科技支撑计划基金资助项目(2014BAF07B01);陕西省工业科技攻关项目(2017GY-039);陕西省教育厅服务地方专项计划项目(16JF009)

摘　　要：针对晶圆测试平台内部构造和工作特点,采用了多体系统理论法对晶圆测试平台空间定位误差进行建模。首先通过低序体阵列描述多体系统拓扑结构,将晶圆测试平台各体之间的关系转换为各坐标系之间的关系,然后建立低序体之间的理想与实际特征变换矩阵,最终建立晶圆测试平台空间定位误差模型。上述模型包含了由于制造、装配、运动控制不精确等因素带来的空间定位误差。给出了晶圆测试平台空间定位误差的数学表达式,为后续误差补偿提供理论基础。In order to improve the positioning accuracy of wafer test platform,according to its internal structure and working characteristics,the factors affecting the accuracy of spatial positioning were analyzed. The multi-body system theory was used to model the spatial positioning error of the wafer test platform. First,the structure of the multi-body system was described with low-order array. The relationship between the components of the wafer test platform was transformed into the coordinate system. And then,the ideal and practical feature transformation matrix between low-order bodies was established. Finally,we established the spatial positioning error model of wafer test platform.The model contains the spatial positioning error due to factors such as manufacturing,assembly,and inaccurate motion control. The mathematical expression of the spatial positioning error of the wafer test platform was given,which provides the theoretical basis for the subsequent error compensation.

关 键 词：晶圆测试平台 多体系统理论 空间定位误差 变换矩阵 

分 类 号：TP202[自动化与计算机技术—检测技术与自动化装置]