柔性衬底铝掺杂氧化锌透明导电膜的特性研究  

Properties of ZnO:Al films deposited on flexible substrates

作　　者：郝晓涛[1] 马瑾[1] 田茂华 王卿璞[2] 马洪磊[1] 叶丽娜[1] 陈峰[2] 

机构地区：[1]山东大学光电材料与器件研究所,济南250100 [2]山东大学物理系,济南250100

出　　处：《功能材料与器件学报》2002年第1期8-12,共5页Journal of Functional Materials and Devices

基　　金：国家自然科学基金资助项目(No.69876025)

摘　　要：室温下采用射频磁控溅射法在有机薄膜-聚丙烯己二酯(polypropyleneadipate,PPA)衬底上制备出了ZnO:Al(AZO)透明导电膜。其它制备参数保持不变的条件下通过改变淀积时间得到厚度不同的薄膜,并对不同厚度AZO薄膜的结构特性、光学特性和电学特性进行了研究。Al-doped zinc oxide (AZO) films were prepared on polypropylene adipate (PPA) substrates at room temperature by r.f. magnetron sputtering technique. The films of various thicknesses were obtained by varying the depositing time. The optical and electrical properties were studied for AZO samples with different thickness, and the structural properties were also discussed.

关 键 词：透明导电膜 AZO薄膜 柔性衬底 氧化锌 表面特性 光电特性 密度 

分 类 号：TN304.21[电子电信—物理电子学]