分度头检测加速度计时横向效应对线性度的影响  

Effect of lateral sensitivity on accelerometer's linearity in static test using protractor

作　　者：李浩[1] 陆德仁[1] 

机构地区：[1]中国科学院上海冶金研究所传感技术国家实验室,上海200050

出　　处：《功能材料与器件学报》2002年第1期40-44,共5页Journal of Functional Materials and Devices

摘　　要：对分度头检测加速度计静态特性相关的几何物理问题进行了分析,结果表明,传感器在分度头上的安装偏差角和传感器自身固有的横向效应都会影响检测精度。用分度头对加速度计进行静态特性的检测,横向效应包含在测量结果的非线性中。用非线性和横向效应都很小的加速度传感器作为试样,在分度头上人为安装有00、50和150的偏角时,检测到的非线性随偏角的增加而变大,与理论分析一致。利用高分辨分度头寻找能降低悬臂梁压阻式加速度传感器横向效应的基准面,以此基准面封装成的传感器的横向效应和非线性的综合效果小于0.05%。Geometry and physics question of accelerometer in static test using protractor were analyzed. The results show that the error of fixing and the inherent lateral sensitivity of the accelerometer can affect the test precision. The output of the accelerometer contains the contribution of the lateral sensitivity and the error of fixing. Using a accelerometer with good non-linearity and low lateral sensitivity, when the inaccurate angle of fixing is 00, 50 and 150,the measured out non-linearity grows up with the angle.The result is consistent with the analysis results. Finally, a method of finding a package plane is reported, using precision protractor with which the chip can be packaged to form an accelerometer with lower lateral sensitivity and non-linearity less than 0.05%.

关 键 词：分度头 检测 加速度计 横向效应 非线性 静态测量 线性度 

分 类 号：TH824.4[机械工程—仪器科学与技术]