ANSYS在接触式电容压力传感器非线性分析中的应用  

Application of ANSYS in the Nonlinearity Analysis of Touch Mode Capacitive Pressure Sensor

作　　者：卞剑涛[1] 颜黄苹[1] 冯勇建[1] 王亚强 

机构地区：[1]厦门大学机电工程系,厦门市361005 [2]Department of Electrical Engineering and Computer Science,Case Western Reserve University

出　　处：《仪表技术与传感器》2002年第3期3-6,共4页Instrument Technique and Sensor

摘　　要：通过对接触式电容传感器结构原理的分析 ,运用ANSYS对传感器膜片在外加压力作用下的接触和大变形等非线性问题进行分析 ,并基于有限元法编写相应的程序 ,直接得出输出电容与外加压力之间的关系。比较实验结果 ,验证了ANSYS对接触式电容压力传感器非线性分析的可行性 。Describes the principle of the touch mode capacitive pressure sensor.Based on the FEA method,provide an ANSYS program,which can analyse some nonlinearity problems such as contact,large deflection and so on when the diaphragm is under pressure load.And the program can be used to get the relationship between capacitance and pressure directly.Compared the measured and other simulation results,the feasibility of the ANSYS applied to analyse the nonlinearity about the touch mode capacitive pressure sensor is validated.And it manifests the practicability of this ANSYS method.

关 键 词：有限元法 微传感器 ANSYS 接触式电容压力传感器 非线性分析 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TB115[自动化与计算机技术—控制科学与工程]