用STM的纳米导电图形加工技术的研究  

Studies of Nanometer Scale Conductive Patterning by STM

作　　者：潘钢[1] 严学俭[1] 吉小松[1] 叶钢锋[1] 张群[1] 章壮健[1] 华中一[1] 

机构地区：[1]复旦大学材料科学系,上海200433

出　　处：《真空科学与技术》2002年第2期123-126,共4页Vacuum Science and Technology

摘　　要：用STM针尖对有机络合物电双稳薄膜材料施加强电场作用 ,可在材料表面产生纳米线度的导电几何图形。实验证明 :对针尖本身的几何构形、施加在针尖上的脉冲幅度、周期和占空比都必须进行细致的选择。用Ag TCNQ络合物进行实验 ,在适合的针尖 样品距离下 ,发现所加脉冲偏压的极性为负时 。Nanometer scale conductive patterns have been produced on thin films of electrical bistable organic complexes using the tip of scanning tunneling microscope (STM) with intense electric fields.Experiments showed that the STM tip should be carefully prepared.Fabrication of nanometer scale patterns on a flat surface of Ag TCNQ was realized when we chose the appropriate bias voltage,pulse height and duration of negative voltage pulses and suitable distance between tip and sample before processing.

关 键 词：纳米导电图形 加工技术 集成电路 扫描隧道显微镜 纳米加工 纳米电子器件 

分 类 号：TN405[电子电信—微电子学与固体电子学] TN605