金刚石薄膜热沉的开发  

DEVELOPMENT OF HEAT SINK MADE OF DIAMOND FILM

作　　者：施海良 阎震[1] 李荣志[1] 唐森[1] 朱鹤孙[1] 

机构地区：[1]北京理工大学材料中心,100081

出　　处：《微细加工技术》1991年第2期66-71,共6页Microfabrication Technology

摘　　要：本文综述了金刚石热沉的发展过程,指出了开发金刚石薄膜热沉的意义,介绍了用直流电弧等离子体喷射法制备的金刚石薄膜的热性质以及金刚石薄膜热沉表面的抛光和金属化方法。The history and the applications of diamond heat sink is reviewed, as well as the good prospect of the heat sink made of diamond film. The thermal properties of the diamond film prepared with DC arc plasma jet is presented, companied with its mirror finishing and metallization methods.

关 键 词：金刚石 薄膜 热沉 

分 类 号：TN304.18[电子电信—物理电子学]