两种物理气相沉积氮化钛涂层的结构及摩擦性能研究  

Structure and Tribological Properties of TiN Coatings Deposited with Two Different PVD Methods

作　　者：韩修训[1] 阎鹏勋[2] 阎逢元[1] 刘维民[1] 余画洋[2] 徐建伟[2] 吴志国[2] 

机构地区：[1]中国科学院兰州化学物理研究所固体润滑国家重点实验室,甘肃兰州730000 [2]兰州大学等离子体与金属材料研究所,甘肃兰州730000

出　　处：《摩擦学学报》2002年第3期175-179,共5页Tribology

基　　金：国家自然科学基金资助 ( 1 0 0 740 2 2 )

摘　　要：分别利用磁过滤阴极弧等离子体沉积装置和直流磁控溅射装置在不锈钢基底上制备了 Ti N涂层 ,采用 X射线光电子能谱仪、X射线衍射仪和扫描电子显微镜对涂层的结构及形貌进行了表征 ;利用纳米压痕仪测定了涂层的硬度 ;在 DF- PM型动摩擦系数精密测定仪上考察了涂层的摩擦学性能 .结果表明 :与采用直流磁控溅射法在 40 0℃基底上制备的 Ti N涂层相比 ,采用磁过滤沉积装置在室温下制备的 Ti N涂层更加致密 ,表面平滑 ,最大硬度达 3 5 GPa,摩擦系数明显较小 ( 0 .1～ 0 .4) 。Titanium nitride coatings were deposited on unheated stainless-steel substrate and stainless-steel substrate heated to 400^DDGC by filtered cathodic arc plasma deposition (FCAP) and direct current magnetron sputtering deposition (DCSP), respectively. The structure, morphology, bonding strength and tribological behavior of the coatings were comparatively investigated. Thus a nanoindenter was used to measure the hardness of the coatings. The structure and the surface morphology of the coatings were analyzed with X-ray diffraction, X-ray photoelectron spectrometry and scanning electron microscopy, and the friction and wear behavior of the coatings was examined with a DF-PM one-way reciprocating friction and wear test rig in a ball-on-plate contact configuration. The results show that the TiN coating deposited by FCAP is dense and smooth than that deposited by DCSP, and it has much higher hardness and bonding strength to the substrate as well. This accounts for the better friction-reducing and antiwear ability of the coating produced with the FCAP method. The substrate material used in the test is 1Cr18Ni9Ti.

关 键 词：物理气相沉积 氮化钛涂层 结构 摩擦性能 纳米压入 PVD 

分 类 号：TG174.444[金属学及工艺—金属表面处理]