球面间隙大范围测量的建模与线性化研究  

Modelling and Linearization for Long-range Spherical Gap Measurement

作　　者：韩丰田[1] 高钟毓[1] 王永梁[1] 

机构地区：[1]清华大学,北京100084

出　　处：《仪器仪表学报》2002年第3期257-260,共4页Chinese Journal of Scientific Instrument

摘　　要：有源静电悬浮轴承通过检测电极与转子间构成的球面间隙电容以得到转子位移。在转子起支时 ,要能实现球面间隙的大范围线性测量。本文重点推导了球面电容与球面间隙的非线性关系 ,提出了采用软件非线性校正的方法实现球面间隙大范围测量的线性化 ,使转子位移的线性测量范围可以达到标称间隙的 6 6 % ,满足了静电轴承起支过程的要求。The rotor motion in an active electrostatic bearing is obtained by detecting the variation of the spherical capacitance between electrodes and the rotor. It's necessary to realize the long\|range detection of the spherical gap in the take\|off suspension process. This paper focuses on the derivation of relationship between the spherical capacitance and the spherical gap. By proper simplification of the nonlinear model presented in this paper, a nonlinear correction by software is proposed to realize the long\|range spherical gap measurement. The li near range of the rotor displacement reaches 66 percent of the nominal gap when the linearization is applied, which satisfies the requirement for the rotor lift\|up in electrostatic bearings.

关 键 词：球面间隙 微位移测量 球面电容 电容电桥 非线性校正 静电悬浮轴承 

分 类 号：TH822[机械工程—仪器科学与技术] TH133.3[机械工程—精密仪器及机械]