压阻式金刚石压力传感器的优化设计  

Optimum design of piezoresistive diamond pressure sensor

作　　者：莘海维[1] 张志明[1] 戴永斌[1] 沈荷生[1] 

机构地区：[1]上海交通大学微电子所,上海200052

出　　处：《传感器技术》2002年第3期21-24,共4页Journal of Transducer Technology

基　　金：教育部上海交通大学微细技术重点实验室基金资助

摘　　要：介绍了一种新型金刚石高温压力传感器的优化设计方法。采用薄板弯曲理论研究了均匀载荷作用下多晶金刚石方膜在小挠度和大挠度下的应变分布情况。对设计时应当考虑的主要问题包括金刚石力敏电阻条的掺杂浓度 ,电桥的形式 ,电阻条在膜片上的分布以及电阻条的有效长度和形状等进行了讨论。利用模拟程序确定了力敏电阻条的最优有效长度 ,分析了敏感膜片厚度 ,方块电阻等因素对电阻条有效长度和输出响应的影响。Optimum design considerations for poly diamond piezoresistive pressure sensors are demonstrated.The strain distribution based on small and large deflection theories of diamond square diaphragm was studied using theories of plate bend.Some main problems which should be taken into account during design,including the dopant concentration of resistors,the configuration of Wheatstone bridge,the arrangement of resistors on square diaphragm and the effective length and shape of resistors, were discussed.The optimum effective length of resistors has been calculated by a simulation program,and the effects of thickness of square diaphragm and sheet resistance on the effective length and output responses were analyzed.

关 键 词：压阻式 金刚石 压力传感器 灵敏度 优化设计 

分 类 号：TP212.12[自动化与计算机技术—检测技术与自动化装置]