吸收透明导电薄膜生长与复光学常数测定  

Growth of Absorbing Transparent Conducting Films and Determination of the Complex Optical Constant

作　　者：马晓翠[1] 舒启清[1] 

机构地区：[1]深圳大学理学院,深圳518060

出　　处：《深圳大学学报（理工版）》2002年第2期1-7,共7页Journal of Shenzhen University(Science and Engineering)

基　　金：深圳市科技局资助项目 (2 0 0 0 1 2 ) ;深圳大学科研基金资助项目 (991 3)

摘　　要：用带特殊热 (冷 )阱的可控制基片温度的电阻加热式真空蒸镀薄膜装置 ,把吸收透明导电薄膜Au和In2 O3分别通过热蒸镀和活化反应淀积在玻璃基片上 .In2 O3的电阻为80Ω/□ ,光学透射率不小于 80 % .透明导电薄膜的复光学常数可通过测量其反射和透射系数得到 ,但考虑到基片背表面的存在 ,必须对反射和透射系数进行修正 .引入修正后所得到的复光学常数与椭偏测量的结果一致 .In a resistance thermal vacuum evaporator with a special heater (coolant) holder, which can control the sample substrate temperature, Au and In 2O 3 films were deposited on glass slides by a thermal and an activated reactive evaporation technique, respectively. In 2O 3 films have a sheet resistance of 80Ω/□ and an optical transmittance of no less than 80%. The complex optical constants of the absorbing transparent conducting Au and In 2O 3 films can be determined by measuring the reflectance and transmittance if the correction due to the back surface of the glass slide is made. The complex optical constants from the corrected reflectance and transmittance are in agreement with those from ellipsometric measurements.films;reflectance ;trans

关 键 词：薄膜生长 测定 吸收透明导电薄膜 反射系数 透射指数 复光学常数 

分 类 号：O484.5[理学—固体物理] O484.1[理学—物理]