BG-105型分步投影光刻机调平控制系统分析与软件处理  

The Analysis and Programming for BG-105 Stepper's Leveling-control System

作　　者：葛宁[1] 

机构地区：[1]信息产业部电子第四十五研究所,北京东燕郊101601

出　　处：《电子工业专用设备》2002年第1期32-37,共6页Equipment for Electronic Products Manufacturing

摘　　要：概述了调平控制系统在BG - 10 5型分步投影光刻机中的重要性和BG - 10 5型分步投影光刻机调平控制系统的工作原理。重点讨论了该控制系统的软件计算处理方法。实测表明 ,该软件控制系统运行情况良好 ,具有很强的实用性。This paper describes the importance of leveling-control system of BG-105 Stepper and introduces the operating principle of BG-105 Stepper's leveling-control system. It mainly discusses the calculating methods and software programming of the leveling-control system. The experimental performance shows that the software control system works well and it has a high practicability.

关 键 词：调平控制系统 位置检测器 计算方法 软件编程 

分 类 号：TN305.7[电子电信—物理电子学]