玻璃钝化管芯在切割中的改进及冷冻裂片的应用  

Improvement of cutting glass passivated dice andthe application of freezing split

作　　者：毕建伟 

机构地区：[1]山东省半导体研究所,山东淄博255311

出　　处：《半导体技术》2002年第8期67-67,70,共2页Semiconductor Technology

摘　　要：摘要:介绍了美国1006A型切割机切割玻璃钝化管芯中的改进及用制冷系统处理管芯的应用。通过技术论证和实验证明,设备改进后,产品的质量和产量明显提高。The paper introduces the improvement of cutting glass passivated dice by usingAmerican dicing saw machine 1006A,and the application of treating dice by using cooling system.According to the technology and experiment proof, the quality and yield of the product improveddistinctly after the improvement of equipment.

关 键 词：玻璃钝化管芯 切割 划片 玻璃钝化 冷冻裂片 化学汽相沉积 半导体 

分 类 号：TN305.1[电子电信—物理电子学]