子孔径拼接检测光学平面反射镜技术  

Technology of sub-aperture stitching testing optical flat mirror

作　　者：闫公敬[1] 张宪忠[1] 李柱[2] 

机构地区：[1]齐齐哈尔大学应用技术学院,黑龙江齐齐哈尔161000 [2]中国船舶重工集团公司第七一八研究所,河北邯郸056027

出　　处：《红外与激光工程》2014年第7期2180-2184,共5页Infrared and Laser Engineering

基　　金：国家自然科学基金(61036015)

摘　　要：干涉检测作为高精度光学面形加工的基础,其检测精度决定了加工精度。为了解决大口径光学平面反射镜检测问题,基于子孔径拼接算法,提出了一种拼接因子用于重叠区域取值,同时利用Φ100mm口径干涉仪对Φ120mm口径平面反射镜完成拼接检验,并将拼接检测结果与利用Φ150mm口径干涉仪直接检测结果进行了对比分析,实验结果表明,拼接结果无"拼痕",拼接检测结果与全口径测量结果 PV与RMS的相对偏差分别为7.25%与7.14%,检测面形是一致的,由此验证了拼接检测的可靠性和准确性。As the fundamental factor of high precision optical producing, the testing accuracy of interferometry is the key of producing accuracy. In order to solve the problem of large optical flat mirror testing, a kind of stitching factor was provided for overlapped area values, based on the stitching algorithm. At the meantime, the stitching measurement was completed for a Φ120 mm flat mirror with aΦ100 mm interferometer. Comparing the stitching result with the full aperture testing result with a Φ150 mm interferometer, it turns out that the stitching result is smooth and the relative deviation of PV and RMS between the stitching result and the full aperture testing result is 7.25% and 7.14% respectively. The testing result is consistent, verifying the reliability and accuracy of the stitching testing.

关 键 词：光学检测 干涉测量 子孔径拼接 拼接因子 

分 类 号：O439[机械工程—光学工程] O436.1[理学—光学]