平面摇摆式抛光去除模型研究  

Removal model of plane swinging polishing

作　　者：赵恒[1] 鄢定尧[1] 蔡红梅[1] 鲍振军[1] 

机构地区：[1]成都精密光学工程研究中心,成都610041

出　　处：《强激光与粒子束》2014年第3期139-142,共4页High Power Laser and Particle Beams

基　　金：国家高技术发展计划项目

摘　　要：为了完善平面摇摆式抛光的理论并指导加工,基于Preston方程建立了平面摇摆式加工的去除模型,并使用该模型在Matlab中仿真计算元件上各点在不同加工参数情况下的去除量,最终得到不同加工参数情况下所产生的不同去除形貌。通过控制不同参数在430mm×430mm平面石英元件上进行抛光实验,验证去除模型的正确性,对比相同参数下仿真得到的去除形貌和加工后检测得到的面形图可知该去除模型能够正确预测不同加工参数时的去除量,从而证实了该模型能够准确、有效地指导摇摆式抛光。In order to improve the theory on plane swinging polishing,the removal model of plane swinging polishing is founded based on Preston equation,and the relationship between the removal appearance and the machining parameters is acquired through removal simulation of every point in the case of different machining parameters in Matlab.A validity test on a fused silicon with an aperture of 430mm×430mm was performed in different parameters,the results through contrasting the removal appearance after simulating and the surface appearance after processing show that this removal model can correctly forecast the removal quantity in different machining parameters,this proves that the model can accurately and effectively control the swinging polishing process.

关 键 词：摇摆式抛光 加工参数 轨迹长度 去除模型 

分 类 号：TN244[电子电信—物理电子学]