Al_2O_3单晶W-Y_2O_3金属化工艺研究  

W-Y_2O_3 Metallization Technology for Single Crystal of Al_2O_3 Ceramic

作　　者：陆艳杰[1] 王永[1] 张小勇[1] 李新成[1] 李锴[1] 

机构地区：[1]北京有色金属研究总院粉末冶金及特种材料研究所,北京100088

出　　处：《稀有金属》2014年第4期589-595,共7页Chinese Journal of Rare Metals

基　　金：国家科技部"十二五"科技支撑项目(2011BAE22B01)资助

摘　　要：研究了Y2O3含量及金属化烧结温度对Al2O3单晶W-Y2O3金属化质量的影响。用纯钯钎料对金属化的Al2O3单晶与铌合金进行了真空封接,测试了封接强度和气密性,用扫描电子显微镜(SEM)观察了金属化层形貌,用X射线衍射(XRD)对金属化层进行了物相分析。结果显示,Y2O3含量为2.0%时,封接强度最高,达到45 MPa;Y2O3含量为3.0%时,封接气密性最高,氦漏率达到1×10-10Pa·m3·s-1;Y2O3含量达到5.0%时,金属化层烧结过程中生成的液相量过多,金属化层龟裂。金属化烧结温度对金属化质量及封接件的性能影响显著,金属化烧结温度越高,金属化层越致密,封接件的强度和气密性越高。烧结温度为1650℃时,金属化层经历了固相烧结,真空封接后金属化层呈不连续、厚度不均的分布状态。烧结温度达到1760℃及以上时,金属化层中有液相生成,封接件的强度和气密性明显提高。金属化温度达到1850℃时,焊接后的金属化层保持致密、连续的分布状态,界面反应产物为Al5Y3O12,封接强度高于40 MPa,氦漏气率达到1×10-10Pa·m3·s-1,为比较理想的金属化烧结温度。Abstract： The influence of Y2O3 content and sintering temperature of W-Y2O3 metallization quality on Al2O3 single crystal was inves- tigated. The metallized Al2O3 single crystal and niobium alloy were welded in vacuum environment with pure palladium solder. The tensile strength and the leakage rate were tested, and the microstructures of metallized area after welding were analyzed by scanning elec- tronic microscope （SEM） and X-ray diffraction analysis （XRD）. The results showed that the maximum of tensile strength achieved 45 MPa when the weight content of Y2O3 in metallization was 2.0%. And the highest air tightness was acquired with the minimum of vacutan leakage of 1 × 10^-10 Pa·m3 ·s^-1 when the weight content of Y2O3 was 3.0%. The metallization layer was full of cracks when the weight content of Y2O3 was up to 5.0% because of overproduction of liquid phase. The metallization quality and the property of sealing parts were significantly affected by metallization temperature. The denser the metallized layer was, the higher the strength of the sealing parts and air tightness were as metal sintering temperature rose. The metallized layer was uneven and the thickness was in discontinuous distributed state when the metallization temperature was 1650 ℃, while the metaUization layer went through the solid phase sintering. When the sintering temperature was 1760 ℃ or above, with liquid generated in metallized layer, the strength of the sealing parts and air tightness could be improved significantly. When the sintering temperature was 1850 ℃, after welding, the metallized layer kept in density and continuous distribution, interracial reaction products was Al5Y3O12, sealing strength was higher than 40 MPa, and helium leak rate was 1×10^-10 Pa·m3 ·s^-1. So 1850 ℃ was considered as the ideal metal sintering temperature.

关 键 词：氧化铝单晶 W-Y2O3 金属化 强度 气密性 

分 类 号：TB751[一般工业技术—真空技术]