硬质合金表面类金刚石涂层的研究进展  

Research Progress in Diamond-Like Carbon Coated Cemented Carbide

作　　者：郭风丽[1] 彭文屹[1] 冯亮[1] 曾卫军 陆德平[3] 王文君[1] 

机构地区：[1]南昌大学材料科学与工程学院,江西南昌330031 [2]慈溪市合力涂层有限公司,浙江宁波315301 [3]江西省科学院应用物理研究所,江西南昌330029

出　　处：《稀有金属》2014年第4期720-729,共10页Chinese Journal of Rare Metals

基　　金：国家科技支撑项目(2011BAC10B04);江西省铜钨新材料重点实验室(2012-KLP-6)资助

摘　　要：涂层刀具结合了基体高强度高韧性以及涂层高硬度高耐磨性的特点,可以提高刀具寿命和加工效率。类金刚石薄膜(DLC)是由无序sp3键、sp2键、sp1键配位碳原子混合而成,具有一系列与金刚石膜相类似的性能(如热导率高,热膨胀系数小,化学稳定性好,硬度和弹性模量高,耐磨性好及摩擦系数低等)以及优异的耐摩擦性能和自润滑特性,因此成为高速钢和硬质合金刀具理想的表面改性膜。DLC薄膜起源于20世纪70年代,其沉积方法主要有物理气相沉积法(包括磁控溅射沉积、离子束沉积、脉冲激光沉积)和化学气相沉积法,近几年还发展了液相电化学沉积法。其表征方法主要有拉曼光谱、X射线光电子能谱(XPS)、原子力显微镜(AFM)等。DLC薄膜的研究开发应用过程中存在两个主要问题:一是膜基结合力差;二是热稳定性差,这极大降低了工具的使用寿命。改变工艺参数、掺杂、制备中间过渡层、酸蚀法、机械处理等可以提高DLC膜的膜基结合力;元素掺杂以及制备具有高sp3含量无氢的DLC薄膜可以提高薄膜的热稳定性。另外液相电沉积法制备DLC膜性能优异,在保证高膜基结合力的同时具有优异的热稳定性。随着薄膜制备技术的成熟,制备热稳定性好,sp3含量高同时内应力低,满足刀具材料的使用要求的DLC薄膜是可以期待的。Coated cutting tools combined the high toughness, high strength of the substrate with the high hardness, high wear assis- tance of the coatings, which could improve the lifetime and machining efficiency. Diamond-like carbon （ DLC ） film was mixed up by disorders of sp3 bond, sp2 bond, sp1 bond, which had a series of properties like diamond （ such as high thermal conductivity, low ther- mal expansion coefficient, good chemical stability, high hardness and elastic modulus, excellent wear resistance, low friction coeffi- cient, etc. ） and excellent self-lubricating properties, thus it became an ideal surface modified membrane of high-speed steel and ce- mented carbide tool. DLC film originated from 1970s, and the deposition method included physical vapor deposition （such as magnetron sputtering, ion beam deposition, and pulsed laser deposition） and chemical vapor deposition. In recent years, liquid electrochemical deposition technology was developed. The main property characterization methods were Raman spectra, X-ray photoelectron spectroscopy （XPS）, and atomic force microscope （AFM） and so on. Two main problems existed during the application process of the DLC film： poor adhesion strength and poor thermal stability, which greatly reduced the working life of the coated tools. Moreover, varying the process parameters, doping, introducing an interlayer, acid etching, and using mechanical treatments could improve the adhesion strength of the DLC film; the thermal stability could be improved by metal elements doping and preparing hydrogen-free DLC film with high sp3 content. In addition, the properties of DLC films prepared by liquid phase electrodeposition technique were excellent, which ensured a high adhesion as well as excellent thermal stability. With the development of the film preparation technology, DLC films with good thermal stability, high sp3 content and low internal stress, which were adapted to the operating requirements of the tool materials, could be expected.

关 键 词：硬质合金 DLC薄膜 膜基结合力 热稳定性 

分 类 号：TG135.5[一般工业技术—材料科学与工程]