溶胶-凝胶法制备Ag掺杂的ZnO薄膜及其结构和光学性能的研究(英文)  

Structural and Optical Properties of Silver Doped Zinc Oxide Thin Films Prepared by Sol-Gel Method

作　　者：年洪恩[1,2] 申月[1] 任秀峰[1,2] 李翔[1,2] 海春喜[1] 云强[1,2] 

机构地区：[1]中国科学院青海盐湖研究所盐湖资源与化学重点实验室,西宁810008 [2]中国科学院大学,北京100049

出　　处：《人工晶体学报》2014年第7期1640-1644,共5页Journal of Synthetic Crystals

基　　金：Qinghai International Cooperation Project(2012-H-813);The Chinese Academy of Sciences"Western light"Talent Cultivation Plan"Joint Scholars"

摘　　要：溶胶-凝胶法制备了Ag掺杂的ZnO薄膜(AZO)。采用X射线衍射(XRD)、扫描电子显微镜(SEM)、UV-VIS分光光度计、光致发光检测研究了掺杂浓度和退火温度对AZO薄膜光学和结构的影响。AZO薄膜呈(002)择优生长的纤维锌矿六角形结构的多晶相。0.5%和1%Ag掺杂的薄膜在可见光波长区域光学透过率在70%～80%之间,随着Ag掺杂浓度的升高平均透过率有所降低。5%Ag掺杂的ZnO薄膜经空气中700℃退火后出现两条发射光谱带,经He气氛中退火后UV发射光谱显著增强,并且可见光发射光谱随之消失。Ag-doped ZnO thin films（AZO） were prepared by sol-gel method. The effects of dopant concentration and annealing temperature on the optical and structural properties of Ag-doped ZnO thin films were explored through X-ray diffraction（XRD）,scanning electron microscope（SEM）,UV-VIS spectrophotometer and Photoluminescence detection. The AZO thin films have a polycrystalline phase with the preferred growth direction of（002） as well as the wurtzite hexagonal structure. The optical transmittance spectra of 0. 5% and 1% Ag doped ZnO films show a transmittance between 70% and 80%within the visible wavelength region,where a decrease in average transmission is observed with increasing Ag-doping concentration. PL spectra of the annealed 5% Ag doped ZnO thin films at 700 ℃ in air exhibits two emission bands,while the UV emission is strongly enhanced and the visible emission disappeared when the films are annealed in He.

关 键 词：ZNO薄膜 退火温度 溶胶-凝胶法 AG掺杂 透过率 

分 类 号：TN304.21[电子电信—物理电子学]