基于驱动电流的水下热敏剪应力微传感器灵敏度研究  

Research on sensitivity of thermal micro sensor for underwater shear stress measurement based on drive current

作　　者：朱鹏飞[1] 马炳和[1] 姜澄宇[1] 邓进军[1] 王云龙[1] 

机构地区：[1]西北工业大学空天微纳系统教育部重点实验室,陕西西安710072

出　　处：《传感器与微系统》2014年第9期52-54,61,共4页Transducer and Microsystem Technologies

基　　金：国家重大科学仪器设备开发专项资助项目(2013YQ040911)

摘　　要：驱动电流是热敏式剪应力微传感器的一个重要参数。增大驱动电流可以提高传感器的灵敏度,但传感器的安全工作温度又限制了驱动电流的增大。研究了如何基于驱动电流来最大程度地提高传感器灵敏度。从理论上分析了传感器灵敏度随剪应力输入的变化规律。通过静水中的I-V特性测试实验,确定了传感器在水下工作的最大允许驱动电流。通过电压—剪应力特性测试实验,验证了传感器灵敏度与驱动电流的关系,得到了传感器在最大允许驱动电流激励下的灵敏度。研究,发现最大允许驱动电流可以使传感器在剪应力为0.2Pa时的灵敏度达到23.8mV/Pa。Drive current is an important parameter of thermal shear stress micro sensor. Increasing drive current is helpful for enhancing its sensitivity, however, there must be a maximum allowable drive current for the sake of safe working temperature of the sensor. How to make full use of drive current to increase sensitivity of sensor is studied. Variation rule of sensitivity of sensor with shear stress input is studied by theoretical analysis. The effect of drive current on the sensitivity of sensor is validated by analyzing output voltage-shear stress relationship, the maximum allowable drive current of the sensor working underwater is determined by I-V characteristic test. It can improve sensitivity of sensor to 23.8 mV/Pa when shear stress input is 0.2 Pa.

关 键 词：驱动电流 热敏微传感器 剪应力 水下 

分 类 号：TP212.9[自动化与计算机技术—检测技术与自动化装置]