Fe-Zr-B非晶磁性薄膜的制备与研究  

Preparation and lnvestigation of Magnetic Fe-Zr-B Thin Films

作　　者：徐炜新[1] 程新利[2] 金惠娟[1] 许裕生[3] 

机构地区：[1]上海钢铁研究所,上海200940 [2]中科院上海冶金研究所,上海200050 [3]江苏省苏州大学,苏州215006

出　　处：《金属功能材料》2002年第4期24-29,共6页Metallic Functional Materials

摘　　要：用X 射线衍射、透射电镜、X射线光电子能谱、穆斯堡尔谱研究了直流磁控溅射法制备的Fe Zr B薄膜。用振动样品磁强计测量了薄膜的磁性能。X 射线衍射和透射电镜结果表明 ,制备态的薄膜是非晶的 ;X射线光电子能谱结果表明样品表面氧化较明显 ,深层部分Fe,Zr ,B结合占主导地位 ;穆斯堡尔谱结果表明薄膜中Fe原子周围Zr ,B原子的存在使Fe原子核内场值有所下降并导致超精细场分布P(H)出现双峰结构 ,薄膜中存在两种不同的局域微结构。The amorphous Fe Zr B films prepared by DC magnetron sputtering have been studied using X ray diffraction,TEM,XPS and Mssbauer spectroscopy The magnetic properties of Fe Zr B film have been measured by using VSM XPS shows that the surface of the film has been oxidized partly,the interactions of Fe,Zr,B are strong in deeper part The result of Mssbauer spectroscopy shows that Zr and B atoms around Fe atoms cause the reduction of hypine field at Fe nucleus and make the distribution of magnetic hyperfine field give two peaks This implies that the amorphous Fe Zr B film consists of two amorphous microstructures

关 键 词：Fe-Zr-B合金 非晶薄膜 直流磁控溅射 制备 

分 类 号：TB43[一般工业技术]