无线MEMS传感系统在燃气轮机等恶劣环境下的应用  

Applications of Wireless MEMS Sensing System in Gas Turbine and Harsh Environment

作　　者：尤政[1] 王伟忠[1] 陈硕[1] 阮勇[1] 

机构地区：[1]清华大学精密仪器系精密测试技术及仪器国家重点实验室微纳制造、器件与系统协同创新中心,北京100084

出　　处：《航空学报》2014年第8期2081-2090,共10页Acta Aeronautica et Astronautica Sinica

基　　金：清华大学自主科研计划(20131089351)~~

摘　　要：燃气轮机是应用于航空、能源、海陆交通等诸多领域的重大核心装备之一。对燃气轮机工作过程中各项环境参数(如温度、压力等)的实时监测,可进一步完善和优化燃气轮机结构、提高效率、减少排放和降低维护费用。新近发展起来的基于微机电系统(MEMS)技术的传感系统在高温、高压等恶劣环境下具有无可比拟的应用优势,特别是在恶劣工作条件下以燃气轮机为代表的大型机电设备的各项环境参数监测中,应用潜力巨大。本文对燃气轮机等恶劣环境下的传感技术、无线信号传输技术及SiC无线MEMS传感系统实现方案进行了综合介绍、评述和讨论,并对无线MEMS传感系统在燃气轮机等恶劣环境下的应用进行了展望。Gas turbine is one kind of the core equipment widely applied to many fields such as aviation,energy,sea and land traffic.The real-time monitoring of various environmental parameters in the process of gas turbine work （such as temperature,pressure etc.） can further improve the structure of gas turbine,improve efficiency,reduce emissions and reduce maintenance costs.A new recently developed sensing system based on micro electro mechanical system （MEMS） technology scores high marks in harsh environment （high-temperature,high-pressure）,especially has a great potential for application in the monitoring of various environmental parameters of the gas turbine which is the representative of large mechanical and electrical equipment working in harsh environment.In this paper,the sensing technology in harsh environment,wireless signal transmission technology and the implementation scheme of SiC wireless MEMS sensing system are introduced,reviewed and discussed,and the wireless MEMS sensing system application in gas turbine and harsh environment such as gas turbine is overlooked.

关 键 词：燃气轮机 无线MEMS传感系统 实时监测 恶劣环境 高温 高压 

分 类 号：V241.7[航空宇航科学与技术—飞行器设计] U464.3[机械工程—车辆工程]