基于最优S型曲线轨迹的硅片传输机器人末端振动抑制方法  

Method of Vibration Suppression of the End-effector of Wafer Handling Robot Based on Optimal S-curve Profile

作　　者：吴明月[1,2] 刘延杰[1,2] 蔡鹤皋[1,2] 

机构地区：[1]哈尔滨工业大学,黑龙江哈尔滨150001 [2]机器人技术及系统国家重点实验室,黑龙江哈尔滨150080

出　　处：《机器人》2014年第4期446-454,共9页Robot

基　　金：国家科技重大专项(No.2009ZX02012-002);国家863计划课题(2013AA040901)

摘　　要：针对硅片传输机器人末端低频振动问题,提出了一种基于最优S曲线轨迹的硅片传输机器人低频振动的抑制方法.该方法通过推导在参数化S型曲线输入条件下非线性时变系统的动态响应近似方程得到系统低频振动的振幅方程,并通过优化振幅方程中的S型曲线参数使得低阶振动振幅达到最小值,从而实现低频振动的抑制.首先对硅片传输机器人进行运动学、末端位置误差以及刚柔耦合动力学建模并进行动态特性分析.随后推导了在参数化S曲线输入条件下系统末端的时域动态响应方程近似解析解与振幅方程近似解析解,并根据硅片传输机器人自身的动态特性给出了最优S曲线参数计算方法.最后分别通过数值仿真分析与实验对该方法进行验证.实验结果表明,应用该方法后硅片传输机器人末端x方向的低频振动的振幅降低了53.9%,y方向的低频振动的振幅降低了45%.To solve the problem of low frequency vibration of the end-effector of wafer handling robot, a suppression method is presented based on the optimal S-curve profile. The low frequency vibration of the end-effector is suppressed by minimizing the amplitude of the vibration through optimizing the S-curve profile parameters in the amplitude equations, which are obtained by deducing the approximate dynamic response equations with parameterized S-curve profile input of the nonlinear time-varying system. Firstly, the models of the kinematics, the position error of end effector and the rigid- flexible coupling dynamics of wafer handling robot are built and the dynamic characteristics are analyzed as well. Following that, the approximate analytic solutions of the time domain dynamic response equations and the amplitude equations with parameterized S-curve profile input are deduced, by which the calculation method of the optimal S-curve profile is presented with the consideration of the dynamic characteristics of the wafer handling robot. Finally, the numerical simulations and the experiment are carried out to testify the effectiveness of the method presented. The experimental result shows that the amplitude of the low frequency vibration of the end-effector is reduced by 53.9% and 45% respectively in x and y directions.

关 键 词：硅片传输机器人 振动抑制 轨迹规划 S型曲线 

分 类 号：TP241-3[自动化与计算机技术—检测技术与自动化装置]