微气体传感器微热板电极结构的设计与优化  

Design and optimization of micro-hotplate electrode structure for micro gas sensor

作　　者：刘丽丽[1] 王连元[1] 郭欣[1] 刘震[1] 刘丽[1] 

机构地区：[1]吉林大学物理学院超硬材料国家重点实验室,吉林长春130012

出　　处：《电子元件与材料》2014年第9期50-53,共4页Electronic Components And Materials

基　　金：吉林省科技厅重点科技攻关项目资助(No.20140204027GX)

摘　　要：设计了一种微气体传感器微热板的电极结构,利用有限元分析工具ANSYS对该微热板的温度场和磁场分布进行了分析和优化,研究了微热板加热电极的宽度和间距对温度分布的影响,并对测量电极的结构进行了优化。结果表明:当微热板加热电极的宽度和间距分别为20μm和10μm且测量电极为无叉指结构时,微热板中心区域能获得高且均匀的温度分布,并且磁场强度最小且分布均匀,这种电极结构有助于消除磁场对测量信号的干扰,提高传感器的整体性能。A novel micro-hotplate electrode structure was designed for micro gas sensor. The temperature field and magnetic field distribution of the micro-hotplate were analyzed by using finite element analysis tool ANSYS. Then the effects of the width and spacing of heating electrode on the temperature distribution were analyzed. Finally, the structure of the measuring electrode was optimized. The results show that when the width and spacing of heating electrode are 20 μm and 10μam respectively, and the measuring electrode is without interdigitated structure, the micro-hotplate with high and uniform center temperature distribution can be achieved; at the same time, the minimum and uniform magnetic field distribution is found in the center region of the micro-hotplate; the electrode structure helps to eliminate the interference on the measurement signal from magnetic field and improve the whole performance of the sensor.

关 键 词：微气体传感器 微热板 结构优化 温度分布 有限元分析 磁场分布 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]