提高氢化炉进料温度的措施  

Measures to Raise Feeding Temperature of SiCl4Converter

作　　者：宋张佐 顾国宝[1] 刘阳赞 

机构地区：[1]昆明冶研新材料股份有限公司,云南曲靖655011

出　　处：《云南化工》2014年第4期68-70,共3页Yunnan Chemical Technology

摘　　要：四氯化硅热氢化是改良西门子法生产多晶硅的关键环节,氢化炉的稳定运行是维持系统物料平衡的决定因素。分析了四氯化硅、氢气的进料状况对氢化炉运行的影响,并提出了既提高进料的温度,又节能降耗的措施。Hot hydrogenation of SiCl4 is a critical step in achieving the closed cycle of polycrystalline silicon production based on the modified Simens process. The stable running of SiCl4 converter is a determining factor in maintaining material balance in the system. In this paper,based on the production experience,the author has done an analysis on how the feeding situation of SiCl4 and H2influences the running of SiCl4 converter,and has put forward some effective measures to raise the feeding temperature.

关 键 词：多晶硅 热氢化 四氯化硅 氢化炉 

分 类 号：TQ127.2[化学工程—无机化工]