几种常用光学方法测量薄膜厚度设计  

Several Optical Measurement Methods Applied To Measure Film Thickness

作　　者：苏宝玺[1] 杨文琴[1] 吴荣琴 

机构地区：[1]福建师范大学闽南科技学院,福建泉州362332

出　　处：《长春师范学院学报（自然科学版）》2014年第4期29-32,共4页Journal of Changchun Teachers College

摘　　要：随着科技的进步和精密仪器的应用,薄膜厚度的测量方法层出不穷,准确测量薄膜的厚度和光学常数在薄膜的制备和应用中起着关键的作用,直接关系到该薄膜材料能否正常工作。本文通过对薄膜的光学测量方法进行归类,列举其中一些测量方法在教学中的应用。Due to the advantages of new technology and precise instruments,a variety of approaches to measure film thickness has been developed.And it＇s vital to measure film thickness and optical constants precisely for the preparation and application of the film,which has direct effect on normal work of it.Classified by optical measurement method on the film,the application of some measurement method in teaching is illustrated.

关 键 词：薄膜厚度 光学测量方法 实验教学 

分 类 号：O431[机械工程—光学工程]