快轴伺服系统的设计与性能测试  

Design and performance testing of fast axis servo for diamond turning

作　　者：田富竟[1,2] 李圣怡[1,2] 尹自强[1,2] 李宁[1,2] 

机构地区：[1]国防科技大学机电工程与自动化学院,湖南长沙410073 [2]超精密加工技术湖南省重点实验室,湖南长沙410073

出　　处：《国防科技大学学报》2014年第4期152-157,共6页Journal of National University of Defense Technology

基　　金：国家自然科学基金面上项目(51075393)

摘　　要：研制了用于加工非回转对称光学元件的快轴伺服系统(FAS)的整体结构及其控制系统,系统具备较大行程和高工作频率,最大的行程可达到30mm。系统采用了音圈电机驱动的气体静压轴承技术、线性电流放大器、高分辨率编码器以及高速控制系统。对不同截面形状气浮导轨的静、动态特性进行了有限元分析。系统采用PID反馈和速度/加速度前馈控制方法来改善系统的动态性能。FAS系统0.1mm阶跃响应的上升时间为2ms,最大超调量为0.4%,稳态时间为4ms,对铝件进行超精密切削实验,表面粗糙度可达Ra24nm,实验结果表明系统具有较好的动态和切削特性。The configuration and control system of a linear long stroke and high frequency fast axis servo （FAS） is developed for the production of asymmetric optics. The maximum stroke of the FAS is 30mm. The proposed Fast Axis Servo （FAS） utilizes the aerostatie bearings driven by a voice coil actuator, a custom linear eurrent amplifier, a high- resolution eneoder and a high -speed control system. The static and dynanfie characteristic of air slide with different cross - sectional shapes was studied by the finite element method. A control strategy consists of a proportional, integral and derivative （PID） feedback controller and velocity/acceleration feed forward controller was implemented to accommodate the changed system dynanfies. The 0. lmm step response was applied on the FAS, the rise time is 2ms, the over shoot is 0.4%, the settling time is 4ms. An aluminum part with the super precision cutting has a surface finish value 24nm Ra. The experiment results indicate that the FAS displays satisfactory dynanfie and cutting performance.

关 键 词：快轴伺服系统 气浮导轨 音圈电机 PID和前馈控制器 

分 类 号：TP394.1[自动化与计算机技术—计算机应用技术] TH691.9[自动化与计算机技术—计算机科学与技术]