一种检测光学元件面形的新方法  

A new method for optical component surface shape detection

作　　者：苏海 刘缠牢[2] 穆绵[1,2] 

机构地区：[1]陕西华星电子集团有限公司,陕西咸阳712099 [2]西安工业大学光电工程学院,陕西西安710021

出　　处：《光学仪器》2014年第4期295-299,310,共6页Optical Instruments

摘　　要：随着光学元件的广泛应用,对光学元件面形检测提出了更严格的要求。目前常用的检测光学元件面形的方法有数字刀口检测技术和干涉检测技术,比较这两种方法的检测原理及优缺点,提出了一种适用于工厂在线检测的三维检测方法——投影检测技术。用该方法的检测原理和关键技术对光学元件进行实验验证,证明了投影检测技术这一新方法具有实际应用价值。Along with the widespread applications of optical elements, the requirements of the optical component surface shape detection become stricter. At present, digital edge detection technology and interference detection technology are two common methods of detecting optical component surface shape. In this paper, a brief introduction about the detection principle is given. The advantages and disadvantages of the two detection methods are discussed. A three dimensional detection method, called projection detection technology, is proposed, which is appropriate for factory online inspection. This paper also introduces the detection principle and key technology of this method. In addition, by means of the experimental verification, it further proved that the realistic meaning and practical application value of the proposed projection detection technology.

关 键 词：面形检测 数字刀口检测技术 干涉检测技术 投影检测技术 

分 类 号：TN247[电子电信—物理电子学]